Untitled Document








제품특징
1. 0.1ppm에서 100%까지의 산소농도 변화에 따른 빠른 응답
2. 응용 및 공정에 따른 다양한 모델 구성
3. Applications

- 반도체 제조 공정
- RTP / Thermal Anneal 공정
- 질소 정화 시스템
- 극저온 가스 발생 시스템
- Blanket 가스 분석
- Inlet Gas Purify
- 용접분야에 응용
- 대기중의 oven control
- Glove Box에 응용



제품 원리 - The zirconium oxide sensor






Model


⊙ Model : CG1100

- Range : 0.1 ppm ~ 100 %
- Accuracy : ±2% of reading or .05% O2 absolute (0.5 ppm O2 absolute
    for ppm range), whichever is greater
- Response time : less than 5 sec. at 150 sccm over one decade
- Communication : RS-232 / 485, Baud rate : 9600 / 19200
- I/O port : 15F connector / 제품 catalog 참고
- W x H x D : 20.3 x 20.3 x 20.3



⊙ Model : CG1100 RTP
AMAT Standardization Field Service & Calibration

- Range : 0.1 ppm ~ 100 %
- Accuracy : ±2% of reading or .05% O2 absolute (0.5 ppm O2 absolute
    for ppm range), whichever is greater
- Response time : less than 5 sec. at 115 sccm over one decade
- Communication : RS-232 / 485, Baud rate : 9600 / 19200
- Electronic Flow Meter and VSO Proportional Solenoid Valve
- I/O port : 15F connector / 제품 catalog 참고
- W x H x D : 20.3 x 20.3 x 20.3



⊙ Model : CG1000

- Range : 0.1 ppm ~ 100 %
- Accuracy : ±2% of reading or .05% O2 absolute (0.5 ppm O2 absolute
    for ppm range), whichever is greater
- Response time : less than 5 sec. at 150 sccm
- Communication : RS-485, 2 way addressable. / recorder output 지원.
- W x H x D : 20.3 x 27.3 x 40.6
- Display module 장착.



⊙ Model : TM2000

- Range : 0.1 ppm ~ 100 %
- Accuracy :
   · Percent : ±1.5% of reading or .02% O2 absolute, whichever is
      greater
   · PPM : ±2% of reading or .5% O2 absolute, whichever is greater
- Response time : less than 5 sec. at 600 sccm over one decade
- Communication : RS-485, 2 way addressable. / recorder output 지원
- System composition : control unit / sensor unit 분리.
- 옥외 사용 가능
- Display module 장착.